ArP Plasma 모듈
ArP Plasma 장비
ArP Plasma 연구

Module

Reactor(Head)

개요

ArP plasma head

특징
  • Customized

RF Power generator

개요

ArP plasma RF power generator

특징
  • Arc detection
  • Stability
  • Arcing free
  • The plasma density value can be checked

RF Matcher

개요

ArP plasma RF Matcher

특징
  • able to operate with any kind of RF power with special designed Control program
  • Stability
  • Customized

MFC

개요

ArP plasma MFC

특징
  • Improved stability
  • High accuracy and repeatability
  • Fast response

Module 옵션

Control Box

개요

ArP plasma Module option Control Box

특징
  • Customized
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