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IHP-1000 | SHP-1000
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Large Scale Plasma System
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| Hydrophobic and super-hydrophobic treatment is technology of reducing surface energy dramatically. APPLASMA produces in-line process that NANO film coating technology of Hydrophobic and super-hydrophobic. It is the most advanced technology and can be maximizing value-added with low cost in simplification of manufacturing processes, improvement of quality and performance such as energy devices, display, NANO, MEMS, Bio, optics. |
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~500mm large scale surface treatment |
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High speed treatment : ~50mm/s |
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Excellent Uniformity |
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Atmospheric in-line process |
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Fluorocarbon thin film |
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Aging time : over a year |
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Nano layer thin film : 1~20mm |
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Easy to control thickness |
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Chemical resistance, acids resistance |
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Liquid ingredients
(water, silicon resin, acrylesin 등) |
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Nanoimprint-Hot embossing, UV imprint |
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Micro contact printing |
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Ink jet printing |
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BioMEMS (u-Fluidics) |
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MEMS device (u-Machines) |
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Patterning (Bio chip, Display) |
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Optic device
(Mirror, Glass, Lens, Film) |
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Electrowetting |
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Electric paper |
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Fuel cell, Solar cell |
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IHP
1000 |
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 IHP 1000 |
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AC 200V, 50/60 Hz |
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300 w |
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13.56 MHz |
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Ar, He |
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O2 , N2 |
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0~50 oC |
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0~90 % |
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Air cooled |
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1500mm |
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100 mm/s |
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ball Convayor |
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DC servo & Stepping |
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PLC / 12" touch screen |
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Scan type |
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1000(L)x815(W)x1350(H) |
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100 Kg |
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Hydrophobic Plasma (
