{"id":11563,"date":"2021-05-26T15:12:34","date_gmt":"2021-05-26T06:12:34","guid":{"rendered":"https:\/\/applasma.cafe24.com\/q-a\/"},"modified":"2021-05-26T15:12:48","modified_gmt":"2021-05-26T06:12:48","slug":"q-a","status":"publish","type":"post","link":"https:\/\/www.applasma.com\/vi\/q-a\/","title":{"rendered":"Q &amp; A"},"content":{"rendered":"<div class=\"fusion-fullwidth fullwidth-box fusion-builder-row-1 fusion-flex-container nonhundred-percent-fullwidth non-hundred-percent-height-scrolling\" style=\"background-color: rgba(255,255,255,0);background-position: center center;background-repeat: no-repeat;border-width: 0px 0px 0px 0px;border-color:#ecefef;border-style:solid;\" ><div class=\"fusion-builder-row fusion-row fusion-flex-align-items-flex-start fusion-flex-justify-content-center\" style=\"max-width:104%;margin-left: calc(-4% \/ 2 );margin-right: calc(-4% \/ 2 );\"><div class=\"fusion-layout-column fusion_builder_column fusion-builder-column-0 fusion_builder_column_4_5 4_5 fusion-flex-column\"><div class=\"fusion-column-wrapper fusion-flex-justify-content-flex-start fusion-content-layout-column\" style=\"background-position:left top;background-repeat:no-repeat;-webkit-background-size:cover;-moz-background-size:cover;-o-background-size:cover;background-size:cover;padding: 0px 0px 0px 0px;\"><style type=\"text\/css\">#accordion-11563-1 .fusion-panel:hover{ border-color: #e8e8e8 } #accordion-11563-1 .fusion-panel { border-color:#e8e8e8; }.fusion-accordian  #accordion-11563-1 .panel-title a .fa-fusion-box{ color: #ffffff;}.fusion-accordian  #accordion-11563-1 .panel-title a .fa-fusion-box:before{ font-size: 15px; width: 15px;}.fusion-accordian  #accordion-11563-1 .panel-title a{color:#207bea;font-family:\"Poppins\";font-weight:600;}.fusion-accordian  #accordion-11563-1 .toggle-content{font-size:18px;color:#5c6770;font-family:\"Poppins\";font-weight:400;}.fusion-accordian  #accordion-11563-1 .fa-fusion-box { background-color: #272d3a;border-color: #272d3a;}.fusion-accordian  #accordion-11563-1 .panel-title a:not(.active):hover, #accordion-11563-1 .fusion-toggle-boxed-mode:hover .panel-title a { color: #1a80b6;}.fusion-accordian  #accordion-11563-1 .panel-title .active .fa-fusion-box,.fusion-accordian  #accordion-11563-1 .panel-title a:not(.active):hover .fa-fusion-box { background-color: #1a80b6!important;border-color: #1a80b6!important;}<\/style><div class=\"accordian fusion-accordian\"><div class=\"panel-group\" id=\"accordion-11563-1\"><style type=\"text\/css\">.fusion-accordian  #accordion-11563-1 .panel-31e7d052148109a70 .panel-title a{}.fusion-accordian  #accordion-11563-1 .panel-31e7d052148109a70 .toggle-content{}<\/style><div class=\"fusion-panel panel-default panel-31e7d052148109a70\"><div class=\"panel-heading\"><h4 class=\"panel-title toggle\" id=\"toggle_31e7d052148109a70\"><a aria-expanded=\"false\" aria-controls=\"31e7d052148109a70\" role=\"button\" data-toggle=\"collapse\" data-parent=\"#accordion-11563-1\" data-target=\"#31e7d052148109a70\" href=\"#31e7d052148109a70\"><span class=\"fusion-toggle-icon-wrapper\" aria-hidden=\"true\"><i class=\"fa-fusion-box active-icon awb-icon-minus\" aria-hidden=\"true\"><\/i><i class=\"fa-fusion-box inactive-icon awb-icon-plus\" aria-hidden=\"true\"><\/i><\/span><span class=\"fusion-toggle-heading\">1. \u00c1p su\u1ea5t kh\u00ed quy\u1ec3n plasma l\u00e0 g\u00ec?<\/span><\/a><\/h4><\/div><div id=\"31e7d052148109a70\" class=\"panel-collapse collapse \" araia-labelledby=\"toggle_31e7d052148109a70\"><div class=\"panel-body toggle-content fusion-clearfix\">\n<p>Plasma l\u00e0 m\u1ed9t ch\u1ea5t tr\u1ea1ng th\u00e1i kh\u00ed, trong \u0111\u00f3 c\u00e1c nguy\u00ean t\u1eed ho\u1eb7c c\u00e1c \u0111i\u1ec7n t\u1eed t\u00e1ch ra kh\u1ecfi c\u00e1c ph\u00e2n t\u1eed v\u00e0 \u0111i\u1ec7n ch\u1ea3y v\u00e0 ph\u00e1t s\u00e1ng, v\u00e0 c\u00f3 tr\u1ea1ng th\u00e1i cao nh\u1ea5t trong chuy\u1ec3n ti\u1ebfp, kh\u00f4ng \u0111\u1ed3ng nh\u1ea5t v\u00e0 m\u1eadt \u0111\u1ed9 n\u0103ng l\u01b0\u1ee3ng. Vi\u1ec7c s\u1eed d\u1ee5ng plasma n\u00e0y \u0111\u00e3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, ng\u00e0nh c\u00f4ng nghi\u1ec7p v\u0169 tr\u1ee5 v\u00e0 ng\u00e0nh khai th\u00e1c m\u1ecf. V\u00e0 h\u1ea7u h\u1ebft c\u00e1c plasma n\u00e0y l\u00e0 plasma trong ch\u00e2n kh\u00f4ng. L\u00fd do ch\u00ednh cho vi\u1ec7c s\u1eed d\u1ee5ng ch\u00e2n kh\u00f4ng l\u00e0 v\u00ec d\u1ec5 d\u00e0ng t\u1ea1o ra plasma trong ch\u00e2n kh\u00f4ng Plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n ngh\u0129a \u0111en l\u00e0 plasma trong b\u1ea7u kh\u00ed quy\u1ec3n. Kh\u00ed trong \u0111\u00f3 c\u00e1c \u0111i\u1ec7n t\u1eed r\u01a1i ra kh\u1ecfi c\u00e1c nguy\u00ean t\u1eed ho\u1eb7c c\u00e1c ph\u00e2n t\u1eed t\u1eeb kh\u00ed \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n v\u00e0 ph\u00e1t ra \u00e1nh s\u00e1ng trong \u0111i\u1ec7n l\u00e0 plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n. M\u1eb7c d\u00f9 plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n kh\u00f4ng s\u1eed d\u1ee5ng ch\u00e2n kh\u00f4ng, nh\u01b0ng n\u00f3 l\u00e0 m\u1ed9t l\u0129nh v\u1ef1c c\u1ea7n thi\u1ebft cho nhi\u1ec1u nghi\u00ean c\u1ee9u trong l\u0129nh v\u1ef1c ph\u00e1t tri\u1ec3n plasma, ch\u1ea9n \u0111o\u00e1n v\u00e0 \u1ee9ng d\u1ee5ng trong v\u00e0 ngo\u00e0i n\u01b0\u1edbc.<\/p>\n<\/div><\/div><\/div><style type=\"text\/css\">.fusion-accordian  #accordion-11563-1 .panel-6f8fc174775653099 .panel-title a{}.fusion-accordian  #accordion-11563-1 .panel-6f8fc174775653099 .toggle-content{}<\/style><div class=\"fusion-panel panel-default panel-6f8fc174775653099\"><div class=\"panel-heading\"><h4 class=\"panel-title toggle\" id=\"toggle_6f8fc174775653099\"><a aria-expanded=\"false\" aria-controls=\"6f8fc174775653099\" role=\"button\" data-toggle=\"collapse\" data-parent=\"#accordion-11563-1\" data-target=\"#6f8fc174775653099\" href=\"#6f8fc174775653099\"><span class=\"fusion-toggle-icon-wrapper\" aria-hidden=\"true\"><i class=\"fa-fusion-box active-icon awb-icon-minus\" aria-hidden=\"true\"><\/i><i class=\"fa-fusion-box inactive-icon awb-icon-plus\" aria-hidden=\"true\"><\/i><\/span><span class=\"fusion-toggle-heading\">2. Lo\u1ea1i plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n n\u00e0o?<\/span><\/a><\/h4><\/div><div id=\"6f8fc174775653099\" class=\"panel-collapse collapse \" araia-labelledby=\"toggle_6f8fc174775653099\"><div class=\"panel-body toggle-content fusion-clearfix\">\n<p>Plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u1ea1o ra ch\u1ee7 y\u1ebfu nh\u01b0 plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p, v\u00e0 plasma c\u00e2n b\u1eb1ng nhi\u1ec7t. Plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p l\u00e0 m\u1ed9t plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p v\u1edbi nhi\u1ec7t \u0111\u1ed9 kh\u00ed plasma kh\u00e1c nhau \u0111\u00e1ng k\u1ec3 so v\u1edbi nhi\u1ec7t \u0111\u1ed9 \u0111i\u1ec7n t\u1eed. Plasma nhi\u1ec7t l\u00e0 m\u1ed9t plasma \u1edf tr\u1ea1ng th\u00e1i t\u01b0\u01a1ng t\u1ef1 nh\u01b0 nhi\u1ec7t \u0111\u1ed9 \u0111i\u1ec7n t\u1eed v\u00e0 nhi\u1ec7t \u0111\u1ed9 kh\u00ed. \uc0b0\uc5c5\uc801\uc73c\ub85c \uc5f4\ud50c\ub77c\uc988\ub9c8\ub294 \uc218\ucc9c~\uc218\ub9cc\ub3c4\uae4c\uc9c0 \uc5bb\uc744\uc218 \uc788\ub2e4. M\u1ed9t v\u00ed d\u1ee5 \u0111i\u1ec3n h\u00ecnh v\u1ec1 plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p l\u00e0 plasma x\u1ea3 r\u00e0o c\u1ea3n \u0111i\u1ec7n m\u00f4i, v\u00e0 m\u1ed9t v\u00ed d\u1ee5 \u0111i\u1ec3n h\u00ecnh v\u1ec1 plasma nhi\u1ec7t l\u00e0 plasma h\u00e0n h\u1ed3 quang.<\/p>\n<\/div><\/div><\/div><style type=\"text\/css\">.fusion-accordian  #accordion-11563-1 .panel-d2bc7016d6e4b35f6 .panel-title a{}.fusion-accordian  #accordion-11563-1 .panel-d2bc7016d6e4b35f6 .toggle-content{}<\/style><div class=\"fusion-panel panel-default panel-d2bc7016d6e4b35f6\"><div class=\"panel-heading\"><h4 class=\"panel-title toggle\" id=\"toggle_d2bc7016d6e4b35f6\"><a aria-expanded=\"false\" aria-controls=\"d2bc7016d6e4b35f6\" role=\"button\" data-toggle=\"collapse\" data-parent=\"#accordion-11563-1\" data-target=\"#d2bc7016d6e4b35f6\" href=\"#d2bc7016d6e4b35f6\"><span class=\"fusion-toggle-icon-wrapper\" aria-hidden=\"true\"><i class=\"fa-fusion-box active-icon awb-icon-minus\" aria-hidden=\"true\"><\/i><i class=\"fa-fusion-box inactive-icon awb-icon-plus\" aria-hidden=\"true\"><\/i><\/span><span class=\"fusion-toggle-heading\">3. L\u00e0m th\u1ebf n\u00e0o \u0111\u1ec3 plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n x\u1ea3y ra?<\/span><\/a><\/h4><\/div><div id=\"d2bc7016d6e4b35f6\" class=\"panel-collapse collapse \" araia-labelledby=\"toggle_d2bc7016d6e4b35f6\"><div class=\"panel-body toggle-content fusion-clearfix\">\n<p class=\"\ubc14\ud0d5\uae00\">Plasma x\u1ea3y ra b\u1eb1ng \u0111i\u1ec7n v\u00e0 do \u0111\u00f3 c\u00f3 th\u1ec3 x\u1ea3y ra plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n c\u1ee7a lo\u1ea1i kh\u00e1c.<\/p>\n<p class=\"\ubc14\ud0d5\uae00\">Theo ph\u01b0\u01a1ng ph\u00e1p \u0111i\u1ec7n, n\u00f3 \u0111\u01b0\u1ee3c chia th\u00e0nh d\u00f2ng \u0111i\u1ec7n tr\u1ef1c ti\u1ebfp v\u00e0 AC (bao g\u1ed3m xung) v\u00e0 n\u00f3 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chia th\u00e0nh MF (t\u1ea7n s\u1ed1 trung b\u00ecnh), RF (t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn \u0111i\u1ec7n), MW (Microwave) v\u00e0 c\u00e1c y\u1ebfu t\u1ed1 kh\u00e1c trong d\u00f2ng \u0111i\u1ec7n xen k\u1ebd.<\/p>\n<p class=\"\ubc14\ud0d5\uae00\">H\u1ea7u h\u1ebft c\u00e1c plasma direct current \u1edf \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 t\u1ea1o ra plasma h\u1ed3 quang. S\u1ef1 x\u1ea3 plasma b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng AC c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ph\u00e2n lo\u1ea1i theo t\u1ea7n s\u1ed1. MF (1 ~ 100kHz) c\u00f3 th\u1ec3 x\u1ea3y ra plasma nh\u01b0 t\u1ea7n s\u1ed1 th\u1ea5p v\u1edbi s\u1ef1 ph\u00f3ng \u0111i\u1ec7n DBD. Plasma t\u1ea1o ra v\u00e0o th\u1eddi \u0111i\u1ec3m n\u00e0y l\u00e0 plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p v\u00e0 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng cho m\u00e0ng m\u1ecfng, l\u00e0m s\u1ea1ch, l\u1edbp ph\u1ee7 vv plasma nhi\u1ec7t do s\u1ef1 xu\u1ea5t hi\u1ec7n plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p b\u1eb1ng DBD v\u00e0 ICP c\u00f3 th\u1ec3 x\u1ea3y ra nh\u01b0 t\u1ea7n s\u1ed1 cao c\u1ee7a RF (2 ~ 1000MHz). rong tr\u01b0\u1eddng h\u1ee3p plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p, n\u00f3 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng cho m\u00e0ng m\u1ecfng, l\u00e0m s\u1ea1ch v\u00e0 ph\u1ee7, v\u00e0 m\u1eadt \u0111\u1ed9 plasma cao. Trong tr\u01b0\u1eddng h\u1ee3p ICP, plasma nhi\u1ec7t x\u1ea3y ra, v\u00e0 nhi\u1ec7t \u0111\u1ed9 plasma l\u00e0 h\u01a1n 10.000 \u0111\u1ed9, nh\u01b0ng c\u00f3 m\u1ed9t gi\u1edbi h\u1ea1n v\u1ec1 lo\u1ea1i kh\u00ed c\u00f3 th\u1ec3 g\u00e2y ra plasma. \u1ee8ng d\u1ee5ng n\u00e0y bao g\u1ed3m l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng.<\/p>\n<p class=\"\ubc14\ud0d5\uae00\">MW (microwave: 2 ~ 300GHz) \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng ch\u1ee7 y\u1ebfu \u0111\u1ec3 t\u1ea1o ra plasma nhi\u1ec7t v\u00e0 kh\u00f4ng c\u00f3 gi\u1edbi h\u1ea1n v\u1ec1 lo\u1ea1i kh\u00f4ng \u0111i\u1ec7n c\u1ef1c v\u00e0 kh\u00ed. C\u00e1c \u1ee9ng d\u1ee5ng n\u00e0y bao g\u1ed3m x\u1eed l\u00fd kh\u00ed \u0111\u1ed9c v\u00e0 l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng<\/p>\n<\/div><\/div><\/div><style type=\"text\/css\">.fusion-accordian  #accordion-11563-1 .panel-3023e77965fa1dff0 .panel-title a{}.fusion-accordian  #accordion-11563-1 .panel-3023e77965fa1dff0 .toggle-content{}<\/style><div class=\"fusion-panel panel-default panel-3023e77965fa1dff0\"><div class=\"panel-heading\"><h4 class=\"panel-title toggle\" id=\"toggle_3023e77965fa1dff0\"><a aria-expanded=\"false\" aria-controls=\"3023e77965fa1dff0\" role=\"button\" data-toggle=\"collapse\" data-parent=\"#accordion-11563-1\" data-target=\"#3023e77965fa1dff0\" href=\"#3023e77965fa1dff0\"><span class=\"fusion-toggle-icon-wrapper\" aria-hidden=\"true\"><i class=\"fa-fusion-box active-icon awb-icon-minus\" aria-hidden=\"true\"><\/i><i class=\"fa-fusion-box inactive-icon awb-icon-plus\" aria-hidden=\"true\"><\/i><\/span><span class=\"fusion-toggle-heading\">4. X\u1ea3 h\u00e0ng r\u00e0o \u0111i\u1ec7n m\u00f4i (DBD)?<\/span><\/a><\/h4><\/div><div id=\"3023e77965fa1dff0\" class=\"panel-collapse collapse \" araia-labelledby=\"toggle_3023e77965fa1dff0\"><div class=\"panel-body toggle-content fusion-clearfix\">\n<p class=\"\ubc14\ud0d5\uae00\">DBD c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chia th\u00e0nh hai lo\u1ea1i, t\u1ea7n s\u1ed1 th\u1ea5p v\u00e0 t\u1ea7n s\u1ed1 cao, t\u00f9y thu\u1ed9c v\u00e0o t\u1ea7n s\u1ed1 \u0111i\u1ec7n. DBD t\u1ea7n s\u1ed1 th\u1ea5p c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 &#8220;silent&#8221; v\u00e0 &#8220;t\u00ednh x\u1ea3 \u00e1p su\u1ea5t th\u1ea5p&#8221; v\u00e0 c\u00f3 m\u1ed9t r\u00e0o c\u1ea3n \u0111i\u1ec7n m\u00f4i \u00edt nh\u1ea5t trong hai \u0111i\u1ec7n c\u1ef1c. Kho\u1ea3ng c\u00e1ch gap kho\u1ea3ng ~ mm v\u00e0 \u0111i\u1ec7n \u00e1p kho\u1ea3ng 5 ~ 20kV. S\u1ef1 h\u00ecnh th\u00e0nh plasma thu \u0111\u01b0\u1ee3c th\u00f4ng qua s\u1ef1 li\u00ean t\u1ee5c \u0111\u1ed3ng th\u1eddi (to\u00e0n b\u1ed9 micro-arcs) c\u1ee7a micro-arcs duy tr\u00ec trong 10 ~ 100ns. Nh\u1eefng microarcs ho\u1eb7c streamer n\u00e0y l\u00e0 m\u1ed9t s\u1ef1 ph\u00f3ng \u0111i\u1ec7n c\u00f3 \u0111\u01b0\u1eddng k\u00ednh ~ 100\u339b Nhi\u1ec7t \u0111\u1ed9 c\u1ee7a c\u00e1c \u0111i\u1ec7n t\u1eed \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 1 \u0111\u1ebfn 10 eV.<\/p>\n<p class=\"\ubc14\ud0d5\uae00\">Trong tr\u01b0\u1eddng h\u1ee3p DBD t\u1ea7n s\u1ed1 cao, \u0111\u01b0\u1eddng cong I-V c\u1ee7a \u0111i\u1ec7n ph\u00e2n th\u1ea5p theo ki\u1ec3u \u0111\u01b0\u1ee3c hi\u1ec3n th\u1ecb v\u00e0 \u0111i\u1ec7n \u00e1p \u0111\u01b0\u1ee3c duy tr\u00ec b\u1edfi plasma v\u1edbi h\u00e0ng tr\u0103m V. Kh\u00ed ch\u00ednh l\u00e0 kh\u00ed kh\u00f4ng ho\u1ea1t \u0111\u1ed9ng, Ar, He vv \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng. C\u00e1c microarcs xu\u1ea5t hi\u1ec7n \u1edf t\u1ea7n s\u1ed1 th\u1ea5p kh\u00f4ng x\u1ea3y ra v\u00e0 m\u1eadt \u0111\u1ed9 plasma cao. Nhi\u1ec7t \u0111\u1ed9 c\u1ee7a c\u00e1c \u0111i\u1ec7n t\u1eed \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 1 \u0111\u1ebfn 3 eV.<\/p>\n<\/div><\/div><\/div><style type=\"text\/css\">.fusion-accordian  #accordion-11563-1 .panel-3134de703965ca773 .panel-title a{}.fusion-accordian  #accordion-11563-1 .panel-3134de703965ca773 .toggle-content{}<\/style><div class=\"fusion-panel panel-default panel-3134de703965ca773\"><div class=\"panel-heading\"><h4 class=\"panel-title toggle\" id=\"toggle_3134de703965ca773\"><a aria-expanded=\"false\" aria-controls=\"3134de703965ca773\" role=\"button\" data-toggle=\"collapse\" data-parent=\"#accordion-11563-1\" data-target=\"#3134de703965ca773\" href=\"#3134de703965ca773\"><span class=\"fusion-toggle-icon-wrapper\" aria-hidden=\"true\"><i class=\"fa-fusion-box active-icon awb-icon-minus\" aria-hidden=\"true\"><\/i><i class=\"fa-fusion-box inactive-icon awb-icon-plus\" aria-hidden=\"true\"><\/i><\/span><span class=\"fusion-toggle-heading\">5. Ch\u1ea9n \u0111o\u00e1n v\u00e0 \u1ee9ng d\u1ee5ng plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n<\/span><\/a><\/h4><\/div><div id=\"3134de703965ca773\" class=\"panel-collapse collapse \" araia-labelledby=\"toggle_3134de703965ca773\"><div class=\"panel-body toggle-content fusion-clearfix\">\n<p class=\"\ubc14\ud0d5\uae00\">Ch\u1ea9n \u0111o\u00e1n v\u00e0 \u1ee9ng d\u1ee5ng plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c coi l\u00e0 l\u0129nh v\u1ef1c d\u1ec5 nh\u00ecn th\u1ea5y v\u00e0 \u0111\u00f2i h\u1ecfi nh\u1ea5t. \u00dd ngh\u0129a c\u1ee7a vi\u1ec7c tr\u00f4ng d\u1ec5 d\u00e0ng l\u00e0 b\u1ea1n c\u00f3 th\u1ec3 c\u1ea3m nh\u1eadn \u0111\u01b0\u1ee3c plasma tr\u1ef1c ti\u1ebfp. N\u00f3 l\u00e0 nhi\u1ec7t \u0111\u1ed9 c\u1ee7a plasma nh\u01b0 l\u00e0 m\u1ed9t v\u00ed d\u1ee5 v\u1ec1 ch\u1ea9n \u0111o\u00e1n d\u1ec5 d\u00e0ng. Trong tr\u01b0\u1eddng h\u1ee3p plasma nhi\u1ec7t \u0111\u1ed9 th\u1ea5p, b\u1ea1n c\u00f3 th\u1ec3 tr\u1ef1c ti\u1ebfp ch\u1ea1m v\u00e0o tay b\u1ea1n, v\u00e0 gi\u1ea5y kh\u00f4ng ch\u00e1y ngay c\u1ea3 khi b\u1ea1n \u0111\u1eb7t gi\u1ea5y v\u00e0o plasma. Trong tr\u01b0\u1eddng h\u1ee3p plasma nhi\u1ec7t, n\u00f3 qu\u00e1 n\u00f3ng \u0111\u1ec3 nh\u00ecn th\u1ea5y plasma \u0111\u00fang c\u00e1ch, v\u00e0 khi b\u1ea1n \u0111\u1eb7t mu\u1ed7ng v\u00e0o plasma, n\u00f3 tan ch\u1ea3y ngay l\u1eadp t\u1ee9c. Tuy nhi\u00ean, kh\u00f4ng kh\u00f3 \u0111\u1ec3 c\u00f3 \u0111\u01b0\u1ee3c m\u1eadt \u0111\u1ed9 plasma, t\u1ea5m plasma, ch\u1ee9c n\u0103ng ph\u00e2n ph\u1ed1i n\u0103ng l\u01b0\u1ee3ng \u0111i\u1ec7n t\u1eed ho\u1eb7c n\u0103ng l\u01b0\u1ee3ng c\u1ee7a c\u00e1c \u0111i\u1ec7n t\u1eed, cho th\u1ea5y c\u00e1c \u0111\u1eb7c t\u00ednh c\u01a1 b\u1ea3n c\u1ee7a plasma b\u1eb1ng c\u00e1ch \u0111i s\u00e2u h\u01a1n m\u1ed9t ch\u00fat. \u0110i\u1ec1u n\u00e0y \u0111\u01b0\u1ee3c thu \u0111\u01b0\u1ee3c nh\u01b0 l\u00e0 m\u1ed9t c\u01a1 s\u1edf cho l\u00fd thuy\u1ebft plasma v\u00e0 l\u00fd thuy\u1ebft v\u1ec1 plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n v\u1eabn ch\u01b0a \u0111\u01b0\u1ee3c h\u1ec7 th\u1ed1ng h\u00f3a. \u1ee8ng d\u1ee5ng plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n l\u00e0 m\u1ed9t l\u0129nh v\u1ef1c k\u1ebft h\u1ee3p v\u1edbi ch\u1ea9n \u0111o\u00e1n plasma. N\u1ebfu b\u1ea1n kh\u00f4ng bi\u1ebft \u0111\u1ea7u v\u00e0o, b\u1ea1n kh\u00f4ng th\u1ec3 gi\u1ea3i th\u00edch \u0111\u00fang ngay c\u1ea3 khi \u0111\u1ea7u ra xu\u1ea5t hi\u1ec7n. Hi\u1ec7n nay, h\u1ea7u h\u1ebft c\u00e1c \u1ee9ng d\u1ee5ng plasma \u1edf H\u00e0n Qu\u1ed1c \u0111\u1ec1u l\u00e0 trial v\u00e0 l\u1ed7i. Tuy nhi\u00ean, c\u00f3 s\u1ef1 kh\u00e1c bi\u1ec7t v\u1ec1 ch\u1ea5t l\u01b0\u1ee3ng t\u1eeb trial v\u00e0 l\u1ed7i nh\u01b0 ch\u1ea9n \u0111o\u00e1n. Trong \u1ee9ng d\u1ee5ng plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n, c\u00e1c kh\u00eda c\u1ea1nh kinh t\u1ebf v\u00e0 hi\u1ec7u qu\u1ea3 \u0111\u00e3 b\u1eaft \u0111\u1ea7u \u0111\u01b0\u1ee3c nh\u1ea5n m\u1ea1nh. Tr\u00ean h\u1ebft, \u0111i\u1ec1u quan tr\u1ecdng l\u00e0 ph\u1ea3i \u0111\u00e1p \u1ee9ng c\u00e1c \u0111i\u1ec1u ki\u1ec7n hi\u1ec7u qu\u1ea3 nh\u1ea5t c\u1ee7a plasma khi n\u00f3 ph\u1ea3i \u0111\u1ed1i m\u1eb7t v\u1edbi qu\u00e1 tr\u00ecnh t\u1ef1 \u0111\u1ed9ng h\u00f3a. T\u1eeb \u0111\u00e2y, \u1ee9ng d\u1ee5ng plasma k\u1ebft h\u1ee3p v\u1edbi ch\u1ea9n \u0111o\u00e1n plasma. Gi\u1ed1ng nh\u01b0 ch\u1ea9n \u0111o\u00e1n plasma ch\u00e2n kh\u00f4ng, ch\u1ea9n \u0111o\u00e1n plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n l\u00e0 m\u1ed9t l\u0129nh v\u1ef1c c\u1ea7n thi\u1ebft cho vi\u1ec7c \u00e1p d\u1ee5ng plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n trong t\u01b0\u01a1ng lai.<\/p>\n<\/div><\/div><\/div><style type=\"text\/css\">.fusion-accordian  #accordion-11563-1 .panel-46c3b2fa8d5517e0a .panel-title a{}.fusion-accordian  #accordion-11563-1 .panel-46c3b2fa8d5517e0a .toggle-content{}<\/style><div class=\"fusion-panel panel-default panel-46c3b2fa8d5517e0a\"><div class=\"panel-heading\"><h4 class=\"panel-title toggle\" id=\"toggle_46c3b2fa8d5517e0a\"><a aria-expanded=\"false\" aria-controls=\"46c3b2fa8d5517e0a\" role=\"button\" data-toggle=\"collapse\" data-parent=\"#accordion-11563-1\" data-target=\"#46c3b2fa8d5517e0a\" href=\"#46c3b2fa8d5517e0a\"><span class=\"fusion-toggle-icon-wrapper\" aria-hidden=\"true\"><i class=\"fa-fusion-box active-icon awb-icon-minus\" aria-hidden=\"true\"><\/i><i class=\"fa-fusion-box inactive-icon awb-icon-plus\" aria-hidden=\"true\"><\/i><\/span><span class=\"fusion-toggle-heading\">6. C\u1ea3i c\u00e1ch b\u1ec1 m\u1eb7t plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n v\u00e0 ho\u1ea1t \u0111\u1ed9ng b\u1ec1 m\u1eb7t c\u1ee7a b\u1ed9 phim FPCB tr\u01b0\u1edbc khi x\u1eed l\u00fd li\u00ean k\u1ebft ACF (COG, COF)<\/span><\/a><\/h4><\/div><div id=\"46c3b2fa8d5517e0a\" class=\"panel-collapse collapse \" araia-labelledby=\"toggle_46c3b2fa8d5517e0a\"><div class=\"panel-body toggle-content fusion-clearfix\">\n<p>FPCB bao g\u1ed3m c\u00e1c thi\u1ebft b\u1ecb \u0111\u1ea7u cu\u1ed1i coverlay + Cu (Ni m\u1ea1) c\u1ee7a v\u1eadt li\u1ec7u PI.<br \/>\nC\u00e1c th\u00e2n xe v\u1eadt li\u1ec7u FPCB \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t th\u01b0\u1eddng kh\u00f4ng ph\u00f9 h\u1ee3p v\u1edbi ch\u1ea5t l\u01b0\u1ee3ng y\u00eau c\u1ea7u trong qu\u00e1 tr\u00ecnh li\u00ean k\u1ebft chip do \u00f4 nhi\u1ec5m ch\u1ea5t h\u1eefu c\u01a1 ho\u1eb7c m\u00e0ng oxit t\u1ef1 nhi\u00ean c\u1ee7a b\u1ed9 kim lo\u1ea1i. \u0110i\u1ec1u n\u00e0y t\u1ef1 nhi\u00ean g\u00e2y ra s\u1ef1 gia t\u0103ng t\u1ef7 l\u1ec7 th\u1ea5t b\u1ea1i, n\u0103ng su\u1ea5t s\u1ea3n xu\u1ea5t k\u00e9m v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng k\u00e9m trong qu\u00e1 tr\u00ecnh li\u00ean k\u1ebft ACF.<\/p>\n<p>V\u1edbi m\u1ee5c \u0111\u00edch c\u1ea3i thi\u1ec7n s\u1ee9c m\u1ea1nh li\u00ean k\u1ebft ACF v\u1edbi vi\u1ec7c lo\u1ea1i b\u1ecf c\u00e1c ch\u1ea5t h\u1eefu c\u01a1 t\u1eeb phim PI v\u00e0 c\u00e1c \u0111\u1ea7u cu\u1ed1i, plasma c\u1ee7a ch\u00fang t\u00f4i s\u1eed d\u1ee5ng x\u1ea3 Algonglow ch\u1ee9 kh\u00f4ng ph\u1ea3i plasma \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n th\u00f4ng th\u01b0\u1eddng \u0111\u1ec3 x\u1eed l\u00fd plasma.<br \/>\n\u0110i\u1ec7n \u00e1p th\u1ea5p, \u0111i\u1ec7n n\u0103ng th\u1ea5p kh\u00f4ng c\u00f3 s\u1ef1 phun tr\u00e0o c\u1ee7a \u0111i\u1ec7n c\u1ef1c, kh\u00f4ng c\u00f3 s\u1ef1 xu\u1ea5t hi\u1ec7n h\u1ea1t, s\u1eed d\u1ee5ng algon v\u1edbi \u0111i\u1ec7n \u00e1p x\u1ea3 th\u1ea5p, \u0111\u1ea3m b\u1ea3o t\u00ednh \u0111\u1ed3ng nh\u1ea5t. Ch\u1ec9 s\u1eed d\u1ee5ng oxy ho\u1eb7c nit\u01a1, kh\u00f4ng th\u1ec3 s\u1eed d\u1ee5ng x\u1ea3 ph\u00e1t s\u00e1ng, g\u00e2y ra c\u00e1c l\u1edbp v\u1ecf h\u1ed3 quang v\u00e0 nhi\u1ec7t<\/p>\n<p>Ch\u00fang t\u00f4i s\u1eed d\u1ee5ng plasma oxy v\u1edbi Algon, nh\u01b0ng b\u1eb1ng c\u00e1ch x\u1eed l\u00fd plasma tr\u1ef1c ti\u1ebfp m\u00e0 kh\u00f4ng c\u1ea7n x\u1ea3 h\u1ed3 quang trong m\u00f4 h\u00ecnh vi m\u00f4 FPCB, ch\u00fang t\u00f4i s\u1ebd cung c\u1ea5p n\u0103ng su\u1ea5t li\u00ean k\u1ebft ACF, c\u1ea3i thi\u1ec7n ch\u1ea5t l\u01b0\u1ee3ng v\u00e0 c\u1ea3i thi\u1ec7n s\u1ee9c m\u1ea1nh li\u00ean k\u1ebft.<\/p>\n<\/div><\/div><\/div><\/div><\/div><\/div><style type=\"text\/css\">.fusion-body .fusion-builder-column-0{width:80% !important;margin-top : 25px;margin-bottom : 25px;}.fusion-builder-column-0 > .fusion-column-wrapper {padding-top : 0px !important;padding-right : 0px !important;margin-right : 2.4%;padding-bottom : 0px !important;padding-left : 0px !important;margin-left : 2.4%;}@media only screen and (max-width:1024px) {.fusion-body .fusion-builder-column-0{width:100% !important;order : 0;}.fusion-builder-column-0 > .fusion-column-wrapper {margin-right : 1.92%;margin-left : 1.92%;}}@media only screen and (max-width:640px) {.fusion-body .fusion-builder-column-0{width:100% !important;order : 0;}.fusion-builder-column-0 > .fusion-column-wrapper {margin-right : 1.92%;margin-left : 1.92%;}}<\/style><\/div><\/div><style type=\"text\/css\">.fusion-body .fusion-flex-container.fusion-builder-row-1{ padding-top : 0px;margin-top : 0px;padding-right : 30px;padding-bottom : 0px;margin-bottom : 0px;padding-left : 30px;}<\/style><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":9643,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[90],"tags":[320,321,322,319,318],"_links":{"self":[{"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/posts\/11563"}],"collection":[{"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/comments?post=11563"}],"version-history":[{"count":7,"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/posts\/11563\/revisions"}],"predecessor-version":[{"id":11572,"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/posts\/11563\/revisions\/11572"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/media\/9643"}],"wp:attachment":[{"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/media?parent=11563"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/categories?post=11563"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.applasma.com\/vi\/wp-json\/wp\/v2\/tags?post=11563"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}