ArP Series Composition

General Specification

FEATURE

  • Easy to install on existing Equipment like Cleaning, inspection And Lamination Purpose

Composition

  • Plasma Head Unit
  • RF Power Generator
  • MFC
  • RF Cable

Plasma Head Unit

ᆞReactor + Matcher Ass’y Unit
ᆞPlasma type : CCP
ᆞDielectric : Quartz or Ceramic
ᆞMain Body : Al Anodized

RF Power generator

ᆞMain Power : 220VAC, 1Phase, 50/60Hz
ᆞFrequency : 13.56Mhz
ᆞPower Range : 300~5000W

MFC & RF Cable

MFC
ᆞCarrier gas : Ar
ᆞProcess gas : O2/N2/CDA

CABLE
ᆞPlasma Ass’y Unit ↔ RF Power  Generator
ᆞ3~10M

ArP Series Table

100mm~

200mm

300W

ex)ArP100

300mm~

500mm

600W

ex)ArP500

600mm~

900mm

1kW

ex)ArP600

1000mm~

1600mm

2kW

ex)ArP1500

1700mm~

2500mm

3kW

ex)ArP2300

2600mm~

5kW

ex)Large size