ArP Merits
General Specification
![head](https://www.applasma.com/wp-content/uploads/2022/06/head.jpg)
Plasma Head Unit
ᆞReactor + Matcher Ass’y Unit
ᆞPlasma type : CCP
ᆞDielectric : Quartz or Ceramic
ᆞMain Body : Al Anodized
![power](https://www.applasma.com/wp-content/uploads/2022/06/power-1.jpg)
RF Power generator
ᆞMain Power : 220VAC, 1Phase, 50/60Hz
ᆞFrequency : 13.56Mhz
ᆞPower Range : 300~5000W
![ArP_MFC_2](https://www.applasma.com/wp-content/uploads/2022/09/ArP_MFC_2.png)
MFC & RF Cable
MFC
ᆞCarrier gas : Ar
ᆞProcess gas : O2/N2/CDA
CABLE
ᆞPlasma Ass’y Unit ↔ RF Power Generator
ᆞ3~10M