The plasma the gas phase. Plasma gases are very different from the nature of ordinary gases and are mixed with ions, electrons, atoms, molecules…
Plasma is an ionized gas energy state with electrical conductivity, and surface treatment is the adhesion between materials.
1. The direct plasma has excellent processing quality and fast processing speed; 2. Relatively low gas consumption, reducing maintenance costs.
1. Atmospheric Plasma Etching
– SiO2/SiON – a-Si/Graphene 2. Atmosph…..
– SiO2/SiON – a-Si/Graphene 2. Atmosph…..