Semiconductor

Fab process

Target process

  • PR Strip process during EUV Photomask manufacturing process
  • EUV PhotoMask cleaning
  • Wafer cleaning

ArP treatment process

  • Vacuum Plasma PR Strip Process Replacement
  • Wafer PR After Exposure Photomask
    A cleaning process
  • Wet Cleaning Process

Comment

  • Organic film removal performance
  • Improved Remaining Performance
  • Activation Performance Enhancements

Package process

Target process

  • Wafer direct bonding

ArP treatment process

  • Replacement of vacuum plasma surface treatment process

Comment

  • Improve Activation performance, reduce ROI