Plasma Products > 라인업 > ArP1500S
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ArP-1500S
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ArP-1500S
특징
This ArP-1500S plasma cleaner using argon gas, it has vacuum stage, used for Fine patterning process. Common Air or N₂ plasma system makes arc damage or particulate pollution to target material, unable to be used, while the ArP-1500S can treat 0.5μm fine patterning without any damage.
Particulate
pollution-free
Arcing
-free
Controllable effect
Big width
| Generator | ||
|---|---|---|
| Input | Power | 3P+1PE, AC 220V,30A |
| Frequency | 13.56Mhz | |
| Condition | Conservationist temp | -15~60℃ |
| Ambient temperature |
0~50℃
|
|
| Cooling type | Air & Water | – |
| Speed range [mm/sec] | 0~500 | – |
| Weight | 500kg | – |
| Size (mm) | 2,300(W) x 3,000(D) x 2,183(H) | – |
| Stage | 1,500mm x 1,300mm | – |
| Utility | ||
| Input | Power | 220VAC 3phase 50/60Hz |
| Frequency | 13.56Mhz | |
| Gas | MFC (Ar) | Range (Ar): ~100lpm |
| MFC (O₂, N₂) | Range (O₂, N₂):~500sccm | |
DEMO 및 문의
