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ArP-1500S

특징
This ArP-1500S plasma cleaner using argon gas, it has vacuum stage, used for Fine patterning process. Common Air or N₂ plasma system makes arc damage or particulate pollution to target material, unable to be used, while the ArP-1500S can treat 0.5μm fine patterning without any damage.

Particulate
pollution-free

 

Arcing
-free

Controllable effect

Big width

Generator
Input Power 3P+1PE, AC 220V,30A
Frequency 13.56Mhz
Condition Conservationist temp -15~60℃
Ambient temperature
0~50℃
Cooling type Air & Water
Speed range [mm/sec] 0~500
Weight 500kg
Size (mm) 2,300(W) x 3,000(D) x 2,183(H)
Stage 1,500mm x 1,300mm
Utility
Input Power 220VAC 3phase 50/60Hz
Frequency 13.56Mhz
Gas MFC (Ar) Range (Ar): ~100lpm
MFC (O₂, N₂) Range (O₂, N₂):~500sccm

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