라인업 Line-Up

ArP-1500S

특징
This ArP-1500S plasma cleaner using argon gas, it has vacuum stage, used for Fine patterning process. Common Air or N₂ plasma system makes arc damage or particulate pollution to target material, unable to be used, while the ArP-1500S can treat 0.5μm fine patterning without any damage.

Particulate
pollution-free

 

Arcing
-free

Controllable effect

Big width

Generator
InputPower3P+1PE, AC 220V,30A
Frequency13.56Mhz
ConditionConservationist temp-15~60℃
Ambient temperature
0~50℃
Cooling typeAir & Water
Speed range [mm/sec]0~500
Weight500kg
Size (mm)2,300(W) x 3,000(D) x 2,183(H)
Stage1,500mm x 1,300mm
Utility
InputPower220VAC 3phase 50/60Hz
Frequency13.56Mhz
GasMFC (Ar)Range (Ar): ~100lpm
MFC (O₂, N₂)Range (O₂, N₂):~500sccm

DEMO 및 문의

문의 유형