라인업 Line-Up
ILP-400LA
라인업 Line-Up
ILP-400LA
특징
Great treating effect
Ozone free
Low temperature
Particle free
High productivity
Inline type solution
| SPEC | ||
| Input | Power Supply | 220VAC, Single Phase/2W+PE, FLA 15A |
| Frequency | 50/60Hz | |
| Condition | RF working frequency | 13.56MHz |
| RF power |
600W
|
|
| Cooling type | Air cooling type | – |
| Ambient conditions | Place free of corrosive and explosive gas in the installation site | – |
| Working ambient temperature | 0~50℃ | – |
| Working ambient humidity | 20~80%(to be free of dew condensation) | – |
| Vibration | 0.5G | – |
| Utility | ||
| Input | Power supply | 220VAC, Single Phase/2W+PE, 50/60Hz, FLA 15A |
| Input Gas 압력 설정 값 | Ar | Φ6 Teflon tube, 0.3 [Mpa] / one touch fitting |
| O₂ | Φ6 Teflon tube, 0.3 [Mpa] / one touch fitting | |
| CDA | Φ10 Teflon tube, 0.5[Mpa] / one touch fitting | |
DEMO 및 문의
