라인업 Line-Up

ILP-600HM

특징
This head moving plasma cleaner using argon gas, it has vacuum stage, used for Mask coating process. One advantage of this solution is controllable treating effect via different process times. It’s available for large scale [Max-1500mm] while having a compact shape.

Compact shape

 

Good uniformity

Arcing free

Controllable effect

Generator
InputPowerSingle Phase 220V
Frequency50/60Hz
ConditionRF 사용 주파수13.56MHz
Full Rated Output Power
1kW
Cooling type공냉식
Speed range [mm/sec]0~500
Weight약 300Kg
Size (mm)1,970(W) X 1,800(L) X 1,600(H)
유효Plasma 처리 폭600mm
Utility
InputRF Power 권장 설정 값460 ~ 500W
RF FrequencyStandard 13.56MHz, ±0.1%, Any Frequency is Available
Input Gas 압력 설정 값Ar0.3 ~ 0.5MPa
O20.3 ~ 0.5MPa

DEMO 및 문의

문의 유형