라인업 Line-Up
ILP-600HM
라인업 Line-Up
ILP-600HM
특징
This head moving plasma cleaner using argon gas, it has vacuum stage, used for Mask coating process. One advantage of this solution is controllable treating effect via different process times. It’s available for large scale [Max-1500mm] while having a compact shape.
Compact shape
Good uniformity
Arcing free
Controllable effect
| Generator | ||
|---|---|---|
| Input | Power | Single Phase 220V |
| Frequency | 50/60Hz | |
| Condition | RF 사용 주파수 | 13.56MHz |
| Full Rated Output Power |
1kW
|
|
| Cooling type | 공냉식 | – |
| Speed range [mm/sec] | 0~500 | – |
| Weight | 약 300Kg | – |
| Size (mm) | 1,970(W) X 1,800(L) X 1,600(H) | – |
| 유효Plasma 처리 폭 | 600mm | – |
| Utility | ||
| Input | RF Power 권장 설정 값 | 460 ~ 500W |
| RF Frequency | Standard 13.56MHz, ±0.1%, Any Frequency is Available | |
| Input Gas 압력 설정 값 | Ar | 0.3 ~ 0.5MPa |
| O2 | 0.3 ~ 0.5MPa | |
DEMO 및 문의
