Plasma Products > 라인업 > ILP-600HM

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ILP-600HM

특징
This head moving plasma cleaner using argon gas, it has vacuum stage, used for Mask coating process. One advantage of this solution is controllable treating effect via different process times. It’s available for large scale [Max-1500mm] while having a compact shape.

Compact shape

 

Good uniformity

Arcing free

Controllable effect

Generator
Input Power Single Phase 220V
Frequency 50/60Hz
Condition RF 사용 주파수 13.56MHz
Full Rated Output Power
1kW
Cooling type 공냉식
Speed range [mm/sec] 0~500
Weight 약 300Kg
Size (mm) 1,970(W) X 1,800(L) X 1,600(H)
유효Plasma 처리 폭 600mm
Utility
Input RF Power 권장 설정 값 460 ~ 500W
RF Frequency Standard 13.56MHz, ±0.1%, Any Frequency is Available
Input Gas 압력 설정 값 Ar 0.3 ~ 0.5MPa
O2 0.3 ~ 0.5MPa

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