ArP plasma head

• Customized

ArP plasma RF power generator

• Arc detection
• Stability
• Arcing free
• The plasma density value can be checked

ArP plasma RF Matcher

• able to operate with any kind of RF power with special designed Control program
• Stability
• Customized

ArP plasma MFC

• Improved stability
• High accuracy and repeatability
• Fast response

ArP plasma Module option Control Box

• Customized